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PECVD Graphite Boats Carrier PECVD Graphite Boats Carrier
PECVD Graphite Boats Carrier PECVD Graphite Boats Carrier
PECVD Graphite Boats Carrier PECVD Graphite Boats Carrier
PECVD Graphite Boats Carrier PECVD Graphite Boats Carrier
PECVD Graphite Boats Carrier PECVD Graphite Boats Carrier
PECVD Graphite Boats Carrier PECVD Graphite Boats Carrier

PECVD Graphite Boats Carrier

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PECVD is short for Plasma Enhanced Chemical Vapor Deposition
 
Harog team has rich experience in producing, researching as well as technology developing.
We are able to develop, design and produce whole graphite boats, relative accessories, tooling fixtures etc., meanwhile we also provide services of installing, repairing, outsourced maintenance and training.
Product Description


· Total investment 40,000,000 RMB

· Capacity 4,500 sets/month

· Top 3 industrial scale

· 50 engineers & professional talents

· 10 relative patents


Graphite boat core technology


· The secondary purification process directly improves the purity of the material. Under long-term working conditions, the resistivity of each point of the graphite boat still maintains excellent uniformity, ensuring uniform current, reducing the color difference of the coating, and effectively slowing down the oxidation of the graphite boat, and eventually improving the service life. 



· The C-coating process gives the surface of the boat plates perfect flatness and smoothness, enlarging the contact area between the graphite plates and the silicon wafers, therefore increasing the times of use and eventually prolonging the service life of the entire graphite boat.



· The balance processing technology eliminates the internal stress of the graphite boats to the greatest extent, the boats will not easily deformed after long-term use, effectively reducing thermal expansion by more than 80%.


Core Indicators of Graphite Boat 

Technical Parameter
Unit
Data
Density
g/cm³
1.87
Specific Resistance
μΩm13
Flexural Strength
MPa
72
Ash Content
PPM
4.7
CTE
1E-6/℃
4.7
Piece Tolerance
mm
±0.01
Thermal Expansionmm
≤0.2
Grain Sizeμm7
Shore Hardness
HSD
70


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