PECVD Graphite Boats PECVD Graphite Boats
PECVD Graphite Boats PECVD Graphite Boats
PECVD Graphite Boats PECVD Graphite Boats
PECVD Graphite Boats PECVD Graphite Boats
PECVD Graphite Boats PECVD Graphite Boats
PECVD Graphite Boats PECVD Graphite Boats

PECVD Graphite Boats

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Harog team has rich experience in producing, researching as well as technology developing.
We are able to develop, design and produce whole graphite boats, relative accessories, tooling fixtures etc., meanwhile we also provide services of installing, repairing, outsourced maintenance and training.
Product Description

· Total investment 40,000,000 RMB

· Capacity 4500 sets/month

· Top 3 industrial scale

· 50 engineers & professional talents

· 10 relative patents


Graphite boat core technology


· The secondary purification process directly improves the purity of the material. Under long-term working conditions, the resistivity of each point of the graphite boat still maintains excellent uniformity, ensuring uniform current, reducing the color difference of the coating, and effectively slowing down the oxidation of the graphite boat, and eventually improving the service life. 



· The C-coating process gives the surface of the boat plates perfect flatness and smoothness, enlarging the contact area between the graphite plates and the silicon wafers, therefore increasing the times of use and eventually prolonging the service life of the entire graphite boat.



· The balance processing technology eliminates the internal stress of the graphite boats to the greatest extent, the boats will not easily deformed after long-term use, effectively reducing thermal expansion by more than 80%.


  • Data Sheet of Graphite Boat 

石墨舟

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If you have any questions, please contact us by email or phone and we will get back to you as soon as possible.

contact details

 +86-0572-6533889
 +86-0572-6533889
  Headquarter: No.4 Building, Meishan Youth Science and Technology Park, Changxing County, Zhejiang Province, China
   Office: Wanlong Plaza 605-1, Industrial Park, Suzhou City, Jiangsu Province, China
 

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